China's largest chipmaker testing first homegrown immersion DUV litho toolhttps://www.tomshardware.com/tech-industry/semiconductors/chinas-largest-foundry-testing-first-domestic-immersion-duv-lithography-tool-smic-takes-significant-step-on-road-to-wafer-fab-equipment-self-sufficiency by dataminer • 10 months ago 3 0 10 months agoTOtomshardware.com